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Alphacen 300
Alphacen 300
The tip-scanning AFM for heavy and large samples up to 300 mm
- Standard AFM system
- 300 mm x 300 mm sample stage
- Ideal for samples up to 45 kg
Nanosurf is the market leader for custom developed systems for large and heavy samples. Over the past years our team has built a substantial knowledge base developing these custom stages for various customers.
Utilizing this vast body of knowledge, we have now developed a standard product for large samples up to 300 mm or heavy samples up to 45 kg. The Alphacen 300 reduces the price and the delivery time compared to a custom system.
| Scanner | |
|---|---|
| Scan head type | Tip scanner |
| Max. scan range (XY) | 100 µm(1) |
| Max. Z-range | 10 µm(1) |
| XY linearity mean error | < 0.1% |
| XY flatness at max. scan range | typ. 5 nm |
| Z-sensor noise-level (RMS) | typ. 150 pm / max. 200 pm |
| Z-measurement noise level (RMS, static mode in air) |
typ. 100 pm / max. 200 pm |
| Z-sensor noise level (RMS, dynamic mode in air) |
typ. 25 pm / max. 35 pm |
| Optical detection light source | 850 nm low coherence SLD |
| DC Detector noise | < 10 pm RMS (0.1 Hz to 1 kHz) |
| AC Detector noise | < 60 fm Hz-1/2 above 100 kHz |
| Detector bandwidth | DC to 4 MHz |
| (1) Manufacturing tolerances ± 10% |
| Stage | |
|---|---|
| Top view field of view | 5 MP, 1.5 mm x 1.1 mm |
| Side view field of view | 5 MP, 3.2 mm x 3.2 mm |
| Max. sample size | 300 mm x 300 mm x 45 mm |
| Max. sample weight | 40 kg |
| Vacuum chuck for | 4’’ / 6’’ / 8’’ / 12’’ wafers |
| Motorized XY travel range | 300 mm x 300 mm |
| Motorized approach range | 50 mm |
| System dimensions | 1008 mm x 1887 mm x 1208 mm (fits through 800 mm door prior to assembling the acoustic enclosure) |
| System weight | 833 kg |
| Stage XY resolution | < 1 µm |
| Unilateral repositioning accuracy | 2 µm |
| Acoustic isolation | ~30 dB above 250 Hz |
| Vibration isolation | Active vibration isolation |
| Controller | |
|---|---|
| High resolution outputs (DAC) | 12x 28 bit, 1 MHz/sampling; thereof 4x user DAC, ±10V/3dB@200kHz |
| Fast outputs (DAC) | 4x 16 bit, 100 MHz/sampling; thereof 1x user DAC, ±1V/3dB@10MHz |
| High resolution inputs (ADC) | 10x 20 bit, 1 MHz/sampling; thereof 4x user ADC, ±10V/3dB@200kHz |
| Fast inputs (ADC) | 3x 16 bit, 100 MHz/sampling; thereof 1x user ADC, ±1V/3dB@10MHz |
| Signal analyzer | 2 signal analyzer function blocks that can be configured as dual channel lock-in |
| FPGA module and embedded processor | System-on-chip module with low-latency FPGA signal processing at 100MHz and dual-core ARM processor, 2GB RAM, 1.5GHz clock |
| Scan control | 28Bit X/Y/Z-DAC with ±10V/3dB@200kHz |
| Detector inputs | Deflection/lateral signals each 16 bit/3dB@10MHz and 28 bit/3dB@200kHz |
| Digital sync, Spike-Guard | 2-bit line/frame sync out 5 V/TTL galvanically isolated, Spike-Guard input |
| Clock sync | 10MHz/3V clock input to synchronize data acquisition and processing |
| Communication to PC | Gigabit Ethernet, galvanically isolated |
| Cantilever | |
|---|---|
| Width | min. 20 μm |
| Length | min. 40 μm |
| Reflective coating | Reflective coating recommended |
| Liquid measurements | Yes, with gold coating |
| Alignment grooves | Required by default Special cantilever holders without alignment grooves are available |
| Cantilever shape | Single rectangular cantilevers and multilever cantilevers (depending on scan head version and cantilever holder) |
| Chip thickness | 300 μm, 500 μm or 600 μm depending on cantilever holder |