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LiteScope AFM-in-SEM

Unique Atomic Force Microscope LiteScope is designed to merge the strengths of AFM and SEM techniques, resulting in effective workflow and extending the possibilities of correlative microscopy and in-situ analysis that ware difficult or almost impossible by conventional instrumentation.

Simultaneous AFM and SEM measurement allows nanometer precise data correlation, making LiteScope a powerful tool for a variety of fields such as Material science, Nanotechnology, Semiconductors, Life science and other areas of research and industry.

  • Technical Data
Dimensions XYZ118 mm x 84 mm x 35.7-48.4 mmScan range in open loop XYZ (±10%)100 μm x 100 μm x 20 μm
Total weight460 gScan range in closed loop XYZ80 μm x 80 μm x 16 μm
Vacuum working range105 Pa to 10-5 PaResolution XYZ up to0.2 nm x 0.2 nm x 0.04 nm
Operating temperature+10 °C to +35 °CMaximum sample height8 mm
Maximal scanned sample area XYZ21 mm x 11 mm x 8 mmMaximum sample weight100 g


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